Sheet resistivity and Transparency of ITO sputtered film
| Wavelength (400nm) | Wavelength (600nm) | Wavelength (800nm) | |
|---|---|---|---|
| Mid-sized system (Thickness:100nm, 45Ω/sq.) |
85.80% | 89.70% | 88.50% |
| Large-sized system (Thickness:100nm, 60Ω/sq.) |
84.00% | 86.80% | 87.70% |
| Mid-sized system (Thickness:300nm, 15Ω/sq.) |
58.70% | 88.20% | 86.80% |
| Large-sized system (Thickness:300nm, 20Ω/sq.) |
55.10% | 84.40% | 81.60% |
- ffective area of above mentioned transmittance by mid-sized system is doughnut shape with OD Φ200mm × Φ80mm.
(50mm square × approx. 6pc /batch, In case of Φ8" × 1pc/batch, above transmittance will not be achieved.) - Effective area of above mentioned transmittance by large-sized system is within 340mm.
(100mm square × 16-20pc/batch, or Φ12" × 4pc/batch)
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| 製品分類1 | Deposition, Photolithography, Etching |
|---|---|
| 製品分類2 | ITO |
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