Semiconductor manufacturing process:semiconductor manufacturing system parts cleaning
It is common in semiconductor manufacturing facilities to outsource chemical cleaning of semiconductor manufacturing system parts. But…
Issues of chemical cleaning outsourcing
- Need to procure sufficient extra parts in stock depend on delivery lead time.
- Troublesome inspection upon shipping/receipt.
- High cleaning cost
Our dry ice blast cleaner "SUPERBLAST" realizes ultra clean and damage-free (surface of anodized/splayed layer) cleaning
Practical application of dry ice blast cleaner "SUPERBLAST"...
Example of optimized cleaning of particle and small hole which is unable to be perfectly cleaned by chemical.
Alumina part
Before cleaning
After chemical cleaned
After cleaning
by SUPERBLAST
Part with small through halls
Before cleaning
After chemical cleaned
After cleaning
by SUPERBLAST
Merit as a result
By changing cleaning mode of vacuum equipment parts from chemical, reduction of dummy runtime was achieved and it led to reduction of re-setup time of production line.
Our original dry ice blast cleaning system "SUPERBLAST" enables removal of remained particles on surface of fine ceramics and deep/narrow part (small hall, slit) of shower plate by applying unique method to blast crushed powder dry ice.