Precision Cleaning Service
We realized an extremely environment-friendly cleaning method.
We receive orders and take care of everything up to the shipping.
Semiconductor and FPD production processing is progressing every single day and the needs for better quality grow constantly. Our Dry Ice System has received a patent for its originality patent No.3030287
In addition to cleaning by dry ice blast (CO2), we are able to apply precision cleaning by sandblasting, chemical solution, calcination, DI water etc. depend on type of contamination. Also detoxifying treatment of toxic material is available.
From receiving the parts for delivery up to shipping
Usage process (Ion Implant,sputter, CVD,etching,etc)
Name of machine
Way of blasting (gas)
The more information we are given, the better estimate we can make If we do not have experience with the certain material, we start from test cleaning and prepare the most suitable cleaning recipe.
- Delivery date : Around 1 week
No.1 : Cleaning parts with thin holes
The 0.3mm pellet in the dry ice powder brings much better cleaning results!
No.2 : Initial cleaningClose Up!
- We clean the surface of the new parts and we reduce the particles, which appear during the beginning of the change of parts.
- In the sub-micron generation, in order to achieve low number of particles, initial cleaning is demanded!
|Al2O3 Bulk||Y2O3 Thermal spray|
|Not cleaned yet
The red circles are particles!
|After chemical cleaning
Reduction results, already visible
|After Dry Ice Cleaning
No existence of particles!
|Oxalic acid alumit||Sulfuric acid alumit|
|Not cleaned yet|
|After chemical cleaning|
|After Dry Ice Cleaning|
Dry ice(CO2) cleaning
system and services
Dry ice(CO2) cleaning system Line-up
- Dry Ice Cleaning System "SUPERBLAST" Line-up
- SUPER BLAST DSC-Ⅰ
- SUPER BLAST DSC-Ⅴ "Reborn"
- SUPER BLAST Elite20 / Xtreme40